PFC Decomposition Catalyst

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Company Name:PureSphere Co., Ltd.
Membership:Free Member
Member Since:2009. 12.04
Country/Region:Korea
City:Daejeon
Contact:Jihn-Koo Lee
Related Keywords:Perflurocompound, PFC, CF4, SF6

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PureSphere Co., Ltd.
[Korea]

Address: 105 Sinildong-ro, Daedeok-gu, Daejeon 306-230, KOREA Daejeon Daejeon

Phone: 82-41-7418642

Contact name: Jihn-Koo Lee

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Product Details

Quick Information

Brand Name: Purelyst
Place of Origin: Korea
Model Number : Purelyst PFC-100

Description

Purelyst PFC-101 catalyst decomposes PFCs (perfluorocompounds. CF₄, CHF₃, C₂F₆, C₃F₈, NF₃, SF₆, etc.) under 750 ^oC by help of steam. PureSphere can recommend customers suitable operation conditions from many experinces at semicondictor and display industries.

1. PFCs Decomposition mechanism
- CF₄ + 2H₂O -> CO₂ + 4HF
- SF₆ + 3H₂O -> SO₂ + 6HF +1/2O₂

2. Advantages
     - Doesn’t have bin deactivated to 850 ^oC
     - Resistant to highly Conc. acidic gases such as BCl₃, Cl₂, F₂, HF, SO₂, etc.
     - CO is not emitted.

3. Information
- Performance data (6.1 MB)

4. Catalyst image
PFC decomposition catalyst

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